Investigation of damage generation process by stress waves during femtosecond laser drilling of SiC
Author:
Funder
Japan Society for the Promotion of Science
Publisher
Elsevier BV
Subject
General Engineering
Reference26 articles.
1. Silicon carbide high-power devices;Weitzel;IEEE Trans Electron Dev,1996
2. The influence of the ionization regime on femtosecond laser beam machining mono-crystalline diamond;Wu;Opt Laser Technol,2018
3. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication;Pecholt;Int J Adv Manuf Technol,2008
4. Optimization of near-infrared laser drilling of silicon carbide under water;Iwatani;Int J Heat Mass Tran,2014
5. Experimental investigation on laser micromilling of SiC microchannels;Deng;Int J Adv Manuf Technol,2019
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