Optimization of near-infrared laser drilling of silicon carbide under water
Author:
Publisher
Elsevier BV
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference22 articles.
1. Residue-free reactive ion etching of silicon carbide in fluorinated plasmas II;Yih;J. Electrochem. Soc.,1995
2. Smooth etching of single crystal 6H–SiC in an electron cyclotron resonance plasma reactor;Flemish;Appl. Phys. Lett.,1994
3. Ultradeep, low-damage dry etching of SiC;Cho;Appl. Phys. Lett.,2000
4. Inductively coupled plasma etching of bulk 6H–SiC and thin-film SiCN in NF3 chemistries;Wang;J. Vac. Sci. Technol., A,1998
5. SiC via holes by laser drilling;Kim;J. Electron. Mater.,2004
Cited by 69 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Coating-assisted picosecond laser ablation for microstructure fabrication of SiC ceramics;Optics Express;2024-07-09
2. A novel numerical modeling of microsecond laser beam percussion micro-drilling of Hastelloy X: experimental validation and multi-objective optimization;The International Journal of Advanced Manufacturing Technology;2024-03-08
3. Laser drilling in silicon carbide and silicon carbide matrix composites;Optics & Laser Technology;2024-03
4. Fabrication of high aspect ratio, non-line-of-sight vias in silicon carbide by a two-photon absorption method;Scientific Reports;2024-01-25
5. Laser drilling of alumina ceramic substrates: A review;Optics & Laser Technology;2023-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3