Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism-Reference-Cited by-同舟云学术

Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

Published:2015-01 Issue: Volume:39 Page:125-133
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Lum Guo Zhan,Teo Tat Joo,Yang Guilin,Yeo Song Huat,Sitti Metin

Publisher

Elsevier BV

Subject

General Engineering

Reference22 articles.

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2. A 3-dof spatial-motion flexure-based parallel nano-manipulator with large workspace and high payload for UV nanoimprint lithography application;Teo,2010

3. A flexure-based planar motion parallel nanopositioner with partially decoupled kinematic architecture;Yang,2008

4. Optimal design of a flexure hinge xyθz wafer stage;Ryu;Precis Eng,1997

5. An ultrapositioning stage for alignment of wafers in advanced microlithography;Lee;Precis Eng,1997

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