Author:
Yoshitomi Kenichiro,Une Atsunobu,Tada Kazuki
Reference10 articles.
1. Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials;Aida;Curr Appl Phys,2012
2. Market and Technology trend of large sized photo mask for LCD;Ihara,2005
3. Development of pin-type vacuum chuck for high precision machining: study on precision chucking with pins;Matsui;J JSPE,1997
4. Effects of support method and mechanical property of 300mm silicon wafer on sori measurement;Natsu;Precis Eng,2005
5. High-speed slicing of SiC ingot by high-speed multi wire saw;Maeda;Mater Sci Forum,2014
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献