A calculation method for workpiece profile variation during double-sided lapping by considering workpiece elastic deformation
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference19 articles.
1. Influence of kinematics on the face grinding process on lapping machines;Uhlmann;CIRP Annals,1999
2. A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP);Kasai;Tribol Int,2008
3. Study on the double-sided grinding of sapphire substrates with the trajectory method;Wang;Precis Eng,2018
4. Optimization of double sided polishing conditions in order to unify friction distance distribution in a wafer;Nakagawa;J Jpn Soc Precis Eng,2006
5. Achievement of high flatness of large diameter silicon wafer in double-sided polishing - optimization of polishing conditions based on kinematical analysis;Hirose;Trans Japan Soc Mech Eng Ser C,2008
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of pad surface morphology on the surface shape of the lapped workpiece;Precision Engineering;2024-01
2. Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing;Materials Science in Semiconductor Processing;2024-01
3. Effect of the vibration displacement responses on end grinding processed surface height;The International Journal of Advanced Manufacturing Technology;2023-11-28
4. Development of a Control System for a Vibratory Lapping-Polishing Machine;2023 IEEE XXVIII International Seminar/Workshop on Direct and Inverse Problems of Electromagnetic and Acoustic Wave Theory (DIPED);2023-09-11
5. Analysis of the Influence of the Motion State of Ultra-Thin Sapphire Based on Layer-Stacked Clamping (LSC);Micromachines;2023-05-26
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3