A large range compliant XY nano-manipulator with active parasitic rotation rejection-Reference-Cited by-同舟云学术

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A large range compliant XY nano-manipulator with active parasitic rotation rejection

Published:2021-11 Issue: Volume:72 Page:640-652
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Liu Yijie^ORCID,Zhang Zhen^ORCID

Publisher

Elsevier BV

Subject

General Engineering

Reference30 articles.

1. Three-dimensional femtosecond laser nanolithography of crystals;Ródenas;Nat Photonics,2019

2. Electron microscopy in semiconductor inspection;Nakamae;Meas Sci Technol,2021

3. Recent advances in nanorobotic manipulation inside scanning electron microscopes;Shi;Microsyst. Nanoeng.,2016

4. Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction;Zhang;Mech Syst Signal Process,2019

5. Design of a large range XY nanopositioning system;Awtar;J Mech Robot,2013

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