Electromagnetic-Mechanical Modeling and Evaluation of a 2-DoF Parallel-Kinematic Compliant Nano-Positioning Stage Based on Normal-Stressed Electromagnetic Actuators-Reference-Cited by-同舟云学术

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Electromagnetic-Mechanical Modeling and Evaluation of a 2-DoF Parallel-Kinematic Compliant Nano-Positioning Stage Based on Normal-Stressed Electromagnetic Actuators

Published:2024 Issue: Volume: Page:1-14
ISSN:1545-5955
Container-title:IEEE Transactions on Automation Science and Engineering
language:
Short-container-title:IEEE Trans. Automat. Sci. Eng.

Author:

Yu Bocheng¹^ORCID,Wang Xiangyuan²^ORCID,Tan Lingwen²^ORCID,Yu Qi²,Meng Yixuan²^ORCID,Li Linlin²,Zhu LiMin²^ORCID

Affiliation:

1. School of Mechanical Engineering, State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, P. R. China

2. School of Mechanical Engineering, State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/8856/4358066/10411999.pdf?arnumber=10411999

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