Author:
Penkov Oleksiy V.,Kopylets Igor A.,Khadem Mahdi,Qin Tianzuo
Subject
Computer Science Applications,Software
Reference22 articles.
1. Soft X-Ray Optics;Spiller,1994
2. A brief history of x-rays;Hessenbruch;Endeavour,2002
3. Special section guest editorial: EUV lithography for the 3-nm node and beyond;Bakshi;J Micro/Nanolith MEMS MOEMS,2017
4. A 6.7-nm beyond euv source as a future lithography source;Otsuka,2012
5. Characterization of multilayer coatings by x-ray reflection;Spiller;Rev Phys Appl,1988
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