Stencil lithography for bridging MEMS and NEMS-Reference-Cited by-同舟云学术

Stencil lithography for bridging MEMS and NEMS

Published:2023-06 Issue: Volume:19 Page:100206
ISSN:2590-0072
Container-title:Micro and Nano Engineering
language:en
Short-container-title:Micro and Nano Engineering

Author:

Ali Basit,Karimzadehkhouei Mehrdad,Nasr Esfahani Mohammad,Leblebici Yusuf,Alaca B. Erdem

Funder

Türkiye Bilimsel ve Teknolojik Araştırma Kurumu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. M&NEMS: a new approach for ultra-low cost 3D inertial sensor;Robert;Proc. IEEE Sensors.,2009

2. Piezoresistive nanowire-based electromechanical sensors;Alaca,2023

3. Resonant accelerometers based on nanomechanical piezoresistive transduction;Miani;Proc. IEEE Int. Conf. Micro Electro Mech. Syst.,2021

4. A new simple fabrication method for silicon nanowire-based accelerometers;Kim,2019

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1. Stencil-Based Selective Surface Functionalization of Silicon Nanowires in 3D Device Architectures for Next-Generation Biochemical Sensors;ACS Applied Nano Materials;2024-05-02

2. Piezoresistance of Silicon Nanowires for Sensing Applications: Optimizing Nanowire Parameters From Electrical and Mechanical Perspectives;IEEE Access;2024

3. Nanoelectromechanical Switches: As a Steep Switching Device;Springer Tracts in Electrical and Electronics Engineering;2024

4. Simplified top-down fabrication of sub-micron silicon nanowires;Semiconductor Science and Technology;2023-11-07

5. Selective Surface Metallization of Single Crystal Silicon Nanowires via Stencil Lithography;2023 IEEE Nanotechnology Materials and Devices Conference (NMDC);2023-10-22