Selective Surface Metallization of Single Crystal Silicon Nanowires via Stencil Lithography-Reference-Cited by-同舟云学术

Selective Surface Metallization of Single Crystal Silicon Nanowires via Stencil Lithography

Published:2023-10-22 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE Nanotechnology Materials and Devices Conference (NMDC)
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Author:

Ali B.¹,Karimzadehkhouei M.²,Esfahani M.N.³,Leblebici Y.⁴,Alaca B.E.⁵

Affiliation:

1. Koç University, Sariyer Rumeli Feneri Yolu,Department of Mechanical Engineering,Istanbul,Türkiye,34450

2. Koç University, and n2STAR-Koç University Nanofabrication and Nanocharacterization Center for Scientific and Technological Advanced Research, Sariyer Rumeli Feneri Yolu,Department of Mechanical Engineering,Istanbul,Türkiye,34450

3. University of York,School of Physics, Engineering and Technology,York,U.K.,YO10 5DD

4. Rectorate, Sabanci University,Tuzla, Istanbul,Türkiye,34956

5. n2STAR-Koç University Nanofabrication and Nanocharacterization Center for Scientific and Technological Advanced Research, and Koç University Surface Technologies Research Center (KUYTAM), Koç University, Sariyer,Department of Mechanical Engineering,Istanbul,Türkiye,34450

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10343386/10343419/10344029.pdf?arnumber=10344029

Reference14 articles.

1. Silicon Nanowires Driving Miniaturization of Microelectromechanical Systems Physical Sensors: A Review

2. Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

3. Utilization of silicon nanowire field-effect transistors for the detection of a cardiac biomarker, cardiac troponin I and their applications involving animal models

4. Improved Long-Term Responses of Au-Decorated Si Nanowire FET Sensor for NH3 Detection

5. Selective Sodium Sensing with Gold-Coated Silicon Nanowire Field-Effect Transistors in a Differential Setup