A 12-inch wafer prealigner-Reference-Cited by-同舟云学术

A 12-inch wafer prealigner

Published:2003-05 Issue:4 Volume:27 Page:151-158
ISSN:0141-9331
Container-title:Microprocessors and Microsystems
language:en
Short-container-title:Microprocessors and Microsystems

Author:

Lee Hee-Sub,Jeon Jae Wook,Kim Joon-Woo,Jung Sung-Jong,Byun Jong-Eun

Publisher

Elsevier BV

Subject

Artificial Intelligence,Computer Networks and Communications,Hardware and Architecture,Software

Reference8 articles.

1. Techniques for calibration of the scale factor and image center for high accuracy 3-D machine vision metrology;Lenz;IEEE Transactions on Pattern Analysis and Machine Intelligence,1988

2. Relative performance of two-dimensional speckle-tracking techniques: normalized correlation, non-normalized correlation and sum-absolute-difference;Friemel;IEEE Proceedings of Ultrasonics Symposium,1995

3. Machine Vision;Jain,1995

4. A3972SB Data Sheet, Allegro MicroSystems, Inc.

5. A generalized approach for the acceleration and deceleration of industrial robots and CNC machine tools;Jeon;IEEE Transactions on Industrial Electronics,2000

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