A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square Regression-Reference-Cited by-同舟云学术

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A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square Regression

Published:2017-10 Issue:4 Volume:14 Page:1771-1777
ISSN:1545-5955
Container-title:IEEE Transactions on Automation Science and Engineering
language:
Short-container-title:IEEE Trans. Automat. Sci. Eng.

Author:

Xu Jiayu,Hu Hong^ORCID,Lei Yulin,Liu Huaiyuan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/8856/8057874/07876780.pdf?arnumber=7876780

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A coarse to fine calibration method for the q-X-Z type wafer pre-alignment device;Journal of Physics: Conference Series;2024-06-01

2. A robust algorithm for rapid pre-alignment of multiple types and sizes of wafers;Signal, Image and Video Processing;2024-01-04

3. A survey on machine and deep learning in semiconductor industry: methods, opportunities, and challenges;Cluster Computing;2023-09-04

4. Design and Implementation of Alignment Device for Proximity Lithography System;2023 35th Chinese Control and Decision Conference (CCDC);2023-05-20

5. A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles;Micromachines;2023-04-27

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