Controller design for a closed-loop micromachined accelerometer

Author:

Soen Jonathan,Voda Alina,Condemine Cyril

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Reference14 articles.

1. An integrated force-balanced capacitive accelerometer for low-g applications;Chau;Sensors and Actuators A,1996

2. Condemine, C., et al. (2005). A 0.8mA 50Hz 15b SNDR ΣΔ closed-loop 10g accelerometer using an 8th-order digital compensator. Proceedings of the 2005 IEEE international solid-state circuits conference (Vol. 13, pp. 248–249). San Francisco.

3. Feedback control theory;Doyle,1992

4. Gupta, R. K., & Senturia, S. D. (1997). Pull-in time dynamics as a measure of absolute pressure. Proceedings of the IEEE 10th international workshop on MEMS (pp. 290–294).

5. Sensitivity enhancement of MEMS inertial sensors using negative springs and active control;Handtmann;Sensors and Actuators A,2002

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