Author:
Handtmann Martin,Aigner Robert,Meckes Andreas,Wachutka Gerhard K.M.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. W. Yun, R.T. Howe, P.R. Gray, Surface-micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry, in: Proceedings of the Technical Digest IEEE Solid-State Sensor and Actuator Workshop 1992, Hilton Head, SC, 2–6 June 1992, pp. 126–131.
2. G.T. Kovacs, Micromachined Transducers Sourcebook, ISBN 0-07-290722-3, McGraw-Hill, New York, 1998.
3. T.B. Gabrielson, Mechanical-thermal noise in micromachined acoustic and vibration sensors, IEEE Transactions on Electron Devices, Vol. 40, 5 May 1993, pp. 903–909.
4. W.A. Clark, R.T. Howe, R. Horowitz, Surface-micromachined Z-axis vibratory Rate Gyroscope, in: Proceedings of the Technical Digest IEEE Solid-State Sensor and Actuator Workshop 1996, Hilton Head, SC, 2–6 June 1996, pp. 283–302.
5. A Three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics;Lemkin;IEEE J. Solid-State Circuits,1999
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献