Author:
Baldi Livio,Cerofolini Gianfranco,Perla Giuseppe
Cited by
8 articles.
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1. Gettering;Physical Chemistry of, in and on Silicon;1989
2. Gettering mechanisms in silicon;Journal of Applied Physics;1988-07-15
3. Solution chemistry in silicon;International Reviews in Physical Chemistry;1988-04
4. The Role of Dopant and Segregation Annealing in Silicon p–n Junction Gettering;Physica Status Solidi (a);1987-10-16
5. A comparison of gettering techniques for very large scale integration;Journal of Applied Physics;1984-01-15