1. H. Strack, K.R. Mayer, B.O. Kolbesen: Solid State Electron. 22, 135 (1979)
2. J.M. Bishman, S.E. Haszko, R.B. Marcus, S.P. Murarka, T.T. Sheng: J. Appl. Phys. 50, 2689 (1979)
3. S.P. Murarka, T.E. Seidel, J.V. Balton, J.M. Bishman, M.H. Read: 156th Meeting Electrochem. Soc. (1979), Abs. No. 489
4. H.R. Huff, F. Shimura: SEMI Symp. Low Temperature Processing for VLSI Large Biameter Wafers (1984)
5. Y. Kondo: In Semiconductor Silicon 1977, ed. by H.R. Huff, R.J. Kriegler, Y. Takeishi: (The Electrochem. Soc., Pennington NJ 1981) p. 220