Growth of hydrogenated amorphous silicon and its alloys
Author:
Publisher
Elsevier BV
Subject
General Materials Science
Reference58 articles.
1. Hydrogenated Amorphous Silicon
2. Part D: real time diagnostics,1996
3. Plasma deposition of hydrogenated amorphous silicon: studies of the growth surface;Abelson;Appl Phys A,1993
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