Author:
Ferreira G.M.,Ferlauto A.S.,Chen Chi,Koval R.J.,Pearce J.M.,Ross C.,Wronski C.R.,Collins Robert W.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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5. Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry
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