Funder
National Science Foundation
Subject
Computer Science Applications,General Chemical Engineering
Reference38 articles.
1. Plasma enhanced chemical vapor deposition: modeling and control;Armaou;Chem. Eng. Sci.,1999
2. Kinetics of heterogeneous catalytic reactions: analysis of reaction schemes;Cortright;Adv. Catal.,2001
3. Chapter 18 - controller tuning and process identification;Coughanowr,2009
4. Multiscale modeling and operation of PECVD of thin film solar cells;Crose;Chem. Eng. Sci.,2015
5. Run-to-run control of PECVD systems: application to a multiscale three-dimensional CFD model of silicon thin film deposition;Crose;AIChE J.,2019
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