Thermoelastic damping in micro- and nanomechanical beam resonators considering size effects-Reference-Cited by-同舟云学术

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Thermoelastic damping in micro- and nanomechanical beam resonators considering size effects

Published:2016-12 Issue: Volume:103 Page:783-790
ISSN:0017-9310
Container-title:International Journal of Heat and Mass Transfer
language:en
Short-container-title:International Journal of Heat and Mass Transfer

Author:

Zhang Hengliang,Kim Taehwan,Choi Geehong,Cho Hyung Hee

Funder

Korean government Ministry of Trade, Industry and Energy

National Research Foundation of Korea

Korea government

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics

Reference25 articles.

1. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sens. Actuators A,1990

2. Micro resonator force gauges;Tilmans;Sens. Actuators A,1992

3. Dissipation measurements of vacuum-operated single-crystal silicon microresonators;Mihailovich;Sens. Actuators A,1995

4. Mechanical dissipation in silicon flexures;Reid;Phys. Lett. A,2006

5. Theory of thermoelastic damping in micromechanical resonators with two-dimensional heat conduction;Prabhakar;J. Microelectromech. Syst.,2008

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