Design and Technology Solutions for 3D Integrated High Performance Systems

Author:

Van der Plas G.,Beyne E.

Publisher

IEEE

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Advancements in metrology for advanced semiconductor packaging;Optics and Photonics for Advanced Dimensional Metrology III;2024-06-18

2. Thermo-Mechanical Reliability Analysis and Raman Spectroscopy Characterization of Sub-micron Through Silicon Vias (TSVs) for Backside Power Delivery in 3D Interconnects;2024 IEEE 74th Electronic Components and Technology Conference (ECTC);2024-05-28

3. Self-Heating Effect of Device-Circuit with Back-side Power Delivery Network beyond 3nm Node;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

4. Detection of bonding voids in multi-tier stacks with scanning acoustic microscope;2023 IEEE 25th Electronics Packaging Technology Conference (EPTC);2023-12-05

5. Reliability Challenges in Advanced 3D Technologies: The Case of Through Silicon Vias and SiCN–SiCN Wafer-to-Wafer Hybrid-Bonding Technologies;IEEE Transactions on Device and Materials Reliability;2023-12

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