Low-temperature Metal Bonding for Optical Device Packaging
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9584450/9584941/09585007.pdf?arnumber=9585007
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Novel Low-Temperature Interconnects for 2.5-/3-D MEMS Integration: Demonstration and Reliability;IEEE Transactions on Components, Packaging and Manufacturing Technology;2024-08
2. Investigative characterization of delamination at TiW-Cu interface in low-temperature bonded interconnects;Materials Characterization;2024-03
3. Low-Temperature Wafer-Level Bonding with Cu-Sn-In Solid Liquid Interdiffusion for Microsystem Packaging;Microelectronic Engineering;2024-03
4. Low-Temperature Cu–(Sn–Bi) Solid Liquid Interdiffusion Bonding – An Initial Study;2023 IMAPS Nordic Conference on Microelectronics Packaging (NordPac);2023-06-12
5. Utilizing Co as a contact metallization for wafer-level Cu-Sn-In SLID bonding used in MEMS and MOEMS packaging;2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC);2022-09-13
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