Origin of Trace Organic Contaminants Adsorbed on the Surface of Silicon Wafers in a Manufacturing Line.
Author:
Affiliation:
1. Advanced Analysis Center, Korea Institute of Science and Technology
2. Department of Chemistry, Yonsei University
Publisher
Springer Science and Business Media LLC
Subject
Analytical Chemistry
Link
http://www.jstage.jst.go.jp/article/analsci/18/4/18_4_477/_pdf
Reference7 articles.
1. Formation of β‐SiC at the interface between an epitaxial Si layer grown by rapid thermal chemical vapor deposition and a Si substrate
2. Organic contamination of silicon wafers by buffered oxide etching
3. Preoxidation UV Treatment of Silicon Wafers
4. Identification and Removal of Trace Organic Contamination on Silicon Wafers Stared in Plastic Boxes
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