X-Ray Fluorescence and Reflectivity Analysis of Multiple-Layer Thin Films.
Author:
Affiliation:
1. IBM Research Division, Almaden Research Center
Publisher
Springer Science and Business Media LLC
Subject
Analytical Chemistry
Link
http://www.jstage.jst.go.jp/article/analsci1985/11/3/11_3_529/_pdf
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence;Journal of Applied Physics;2012-02-15
2. Applicability of X-ray fluorescence spectroscopy as method to determine thickness and composition of stacks of metal thin films: A comparison with imaging and profilometry;Thin Solid Films;2012-01
3. X-Ray Wave Guide and its Possible Application to Surface Analysis;;Journal of Surface Analysis;2002
4. Review on grazing incidence X-ray spectrometry and reflectometry;Spectrochimica Acta Part B: Atomic Spectroscopy;1999-01
5. Fabrication of TiNi shape memory alloy microactuators by ion beam sputter deposition;Nanotechnology;1998-06-01
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