Fabrication of TiNi shape memory alloy microactuators by ion beam sputter deposition
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Reference15 articles.
1. TiNi (shape memory) films silicon for MEMS applications
2. An SMA-based flexible active endoscope for minimal invasive surgery
3. Micron Sized Arm Using Reversible TiNi Alloy Thin Film Actuators
4. Shape‐memory properties in Ni‐Ti sputter‐deposited film
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