Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability-Reference-Cited by-同舟云学术

Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability

Published:2020-07-31 Issue:31 Volume:6 Page:
ISSN:2375-2548
Container-title:Science Advances
language:en
Short-container-title:Sci. Adv.

Author:

Park Tae Wan¹²^ORCID,Byun Myunghwan³^ORCID,Jung Hyunsung¹^ORCID,Lee Gyu Rac⁴,Park Jae Hong⁵⁶,Jang Hyun-Ik⁵⁶^ORCID,Lee Jung Woo⁷,Kwon Se Hun⁷^ORCID,Hong Seungbum⁴^ORCID,Lee Jong-Heun²^ORCID,Jung Yeon Sik⁴^ORCID,Kim Kwang Ho⁷⁸^ORCID,Park Woon Ik⁹^ORCID

Affiliation:

1. Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology (KICET) 101 Soho-ro, Jinju 52851, Republic of Korea.

2. Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea.

3. Department of Advanced Materials Engineering, Keimyung University, 1095 Dalgubeol-daero, Daegu 42601, Republic of Korea.

4. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.

5. Division of Nano-Convergence Technology, Korea National NanoFab Center (NNFC), 291 Daehak-ro, Daejeon 34141, Republic of Korea.

6. NanoIn-Inc, 291 Daehak-ro, Korea National NanoFab Center (NNFC), Daejeon 34141, Republic of Korea.

7. School of Materials Science and Engineering, Pusan National University (PNU), Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 46241, Republic of Korea.

8. Global Frontier R&D Center for Hybrid Interface Materials (HIM), Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 46241, Republic of Korea.

9. Department of Materials Science and Engineering, Pukyoung National University (PKNU), 45 Yongso-ro, Nam-gu, Busan 48513, Republic of Korea.

Abstract

Thermally assisted nanotransfer printing process enables nanopattern formation at an 8-inch wafer.

Funder

National Research Foundation of Korea

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference40 articles.

1. Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials