Wafer‐Scale Replication of Plasmonic Nanostructures via Microbubbles for Nanophotonics

Abstract

AbstractQuasi‐3D plasmonic nanostructures are in high demand for their ability to manipulate and enhance light‐matter interactions at subwavelength scales, making them promising building blocks for diverse nanophotonic devices. Despite their potential, the integration of these nanostructures with optical sensors and imaging systems on a large scale poses challenges. Here, a robust technique for the rapid, scalable, and seamless replication of quasi‐3D plasmonic nanostructures is presented straight from their production wafers using a microbubble process. This approach not only simplifies the integration of quasi‐3D plasmonic nanostructures into a wide range of standard and custom optical imaging devices and sensors but also significantly enhances their imaging and sensing performance beyond the limits of conventional methods. This study encompasses experimental, computational, and theoretical investigations, and it fully elucidates the operational mechanism. Additionally, it explores a versatile set of options for outfitting nanophotonic devices with custom‐designed plasmonic nanostructures, thereby fulfilling specific operational criteria.