Laser-driven hierarchical “gas-needles” for programmable and high-precision proximity transfer printing of microchips

Author:

Chen Furong12ORCID,Gai Mengxin12ORCID,Sun Ningning12,Xu Zhangyu12ORCID,Liu Lei12ORCID,Yu Haiyang12,Bian Jing123ORCID,Huang YongAn12ORCID

Affiliation:

1. State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, P.R. China.

2. Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan 430074, P.R. China.

3. College of Electronic and Optical Engineering and College of Flexible Electronics (Future Technology), National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, Nanjing University of Posts and Telecommunications, Nanjing 210023, China.

Abstract

Micro–transfer printing (μTP) techniques are essential for advanced electronics. However, current contact/noncontact μTP techniques fail to simultaneously achieve high selectivity and transfer accuracy. Here, a laser projection proximity transfer (LaserPPT) technique is presented, which assembles the microchips in an approach-and-release manner, combining high-precision parallelism with individual chip control. An embedded carbon layer with a thin gas layer is generated by an ultraviolet laser, followed by absorbing heat from the infrared laser, to enable the sequential expansion of hierarchical “gas-needles.” The level 1 large gas-needle with a substantially growing height can reduce the gap between the microchip and the receiver. Then, the level 2 small gas-needles enable the gentle release of a chip. Therefore, the LaserPPT can obtain a strong adhesion modulation (~1000 times), excellent size scalability (<100 micrometers), and high transfer accuracy of ~4 micrometers. Last, the assembly of a micro–light-emitting diode display demonstrates the capabilities for deterministic assembly of microarrays.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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