Electrostatic Force-Assisted Transfer of Flexible Silicon Photodetector Focal Plane Arrays for Image Sensors-Reference-Cited by-同舟云学术

Electrostatic Force-Assisted Transfer of Flexible Silicon Photodetector Focal Plane Arrays for Image Sensors

Published:2024-07-22 Issue:30 Volume:16 Page:39572-39579
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Ye Yuting¹²³,Deng Qingyan²³,Wu Jianghong²³,Zhong Chuyu⁴,Ma Hui⁴^ORCID,Shi Yilin²³,Li Dingwei²³,Tang Renjie²³,Tang Yiheng²³,Jian Jialing²³^ORCID,Zhu Bowen²³⁵^ORCID,Lin Hongtao⁴^ORCID,Li Lan²³⁵^ORCID

Affiliation:

1. Zhejiang University, Hangzhou 310027, China

2. Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310030, China

3. Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China

4. State Key Laboratory of Brain-Machine Intelligence, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

5. Westlake Institute for Optoelectronics, Fuyang, Hangzhou 311421, China

Funder

Westlake University

Key Research and Development Program of Zhejiang Province

National Natural Science Foundation of China

Special Support Plan for Photoelectric Chips Research at Westlake University

Key Project of Westlake Institute for Optoelectronics

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.4c05890

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