CMOS-compatible ferroelectric NAND flash memory for high-density, low-power, and high-speed three-dimensional memory

Author:

Kim Min-Kyu1ORCID,Kim Ik-Jyae1ORCID,Lee Jang-Sik1ORCID

Affiliation:

1. Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Korea.

Abstract

A unique three-dimensional integration strategy is provided for high-performance, ultrahigh-density ferroelectric memory.

Funder

Samsung Science and Technology Foundation

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference60 articles.

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2. A 512-Gb 3-b/Cell 64-Stacked WL 3-D-NAND Flash Memory

3. Charge-trapping device structure of SiO2∕SiN∕high-k dielectric Al2O3 for high-density flash memory

4. Performance Improvement in Charge-Trap Flash Memory Using Lanthanum-Based High- $\kappa$ Blocking Oxide

5. J. Jang H.-S. Kim W. Cho H. Cho J. Kim S. I. Shim Y. Jang J. Jeong B. Son D. W. Kim K. Kim J. Shim J. S. Lim K. Kim S. Y. Yi J. Lim D. Chung H.-C. Moon S. Hwang J.-W. Lee Y.-H. Son U. Chung W.-S. Lee Vertical cell array using TCAT (Terabit Cell Array Transistor) technology for ultra high density NAND flash memory in 2009 IEEE Symposium on VLSI Technology (VLSIT) (IEEE 2009) pp. 192–193.

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