Van der Waals epitaxy of nearly single-crystalline nitride films on amorphous graphene-glass wafer

Author:

Ren Fang12ORCID,Liu Bingyao3456ORCID,Chen Zhaolong46ORCID,Yin Yue12,Sun Jingyu67,Zhang Shuo12ORCID,Jiang Bei4,Liu Bingzhi467,Liu Zhetong3456,Wang Jianwei8,Liang Meng12ORCID,Yuan Guodong29,Yan Jianchang12ORCID,Wei Tongbo12,Yi Xiaoyan12,Wang Junxi12,Zhang Yong10ORCID,Li Jinmin12,Gao Peng35611ORCID,Liu Zhongfan46ORCID,Liu Zhiqiang12ORCID

Affiliation:

1. Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

3. Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing 100871, China.

4. Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

5. Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China.

6. Beijing Graphene Institute (BGI), Beijing 100095, China.

7. College of Energy, Soochow Institute for Energy and Materials Innovations, Jiangsu Provincial Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies, Soochow University, Suzhou 215006, China.

8. School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu 610054, China.

9. State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.

10. Department of Electrical and Computer Engineering, The University of North Carolina at Charlotte, Charlotte, NC 28223, USA.

11. Collaborative Innovation Center of Quantum Matter, Beijing 100871, China.

Abstract

The heteroepitaxy of nitride semiconductors can be achieved without needing lattice matching between two material systems.

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China Stem Cell and Translational Research

the Youth Supporting Program of Institute of Semiconductors

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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