Growing of perfect single-crystal epitaxial films of (Si 2 ) 1-x (GaN) x solid solutions on Si (111) substrates from the liquid phase

Author:

Saparov Dadajon1,Saidov A. S.1,Usmonov Sh. N.1,Ishniyazov T. T.1,Kalanov M. U.2,Akhmedov A. M.3

Affiliation:

1. Physical Technical Institute of Uzbekistan Academy of Sciences

2. Institute of Nuclear Physics

3. Tashkent Institute of Irrigation and Agriculture Mechanization Engineers

Abstract

Abstract The technological capabilities of the method of liquid-phase epitaxy from a limited volume of Sn solution-melt for obtaining films of substitutional solid solution (Si2)1−x(GaN)x on Si (111) substrates are shown. The grown films had a single-crystal structure with (111) orientation, n-type conductivity with a resistivity of ρ ~ 1.38 Ω∙cm, a carrier concentration of n ~ 3.4∙1016 cm− 3, and a charge carrier mobility of µ ~ 133 cm2/(V⋅sec). The relatively narrow width (FWHM = 780 arcsec) and high intensity (2⋅105 pulses/sec) of the main structural reflection (111)Si/GaN indicate a high degree of perfection of the crystal lattice of the epitaxial layer (Si2)1−x(GaN)x. The photosensitivity region of p-Si–n-(Si2)1−x(GaN)x heterostructures covers the photon energy range from 1.2 to 2.4 eV, with a maximum at 1.9 eV.

Publisher

Research Square Platform LLC

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