Elongated Inductively Coupled Thermal Plasma Torch Operable at Atmospheric Pressure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
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1. Three-Dimensional Two-Temperature Modeling of Ar Loop-Type Inductively Coupled Thermal Plasma for Surface Modification;Plasma Chemistry and Plasma Processing;2020-11-28
2. Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?;Japanese Journal of Applied Physics;2019-05-30
3. Loop Type of Inductively Coupled Thermal Plasmas System for Rapid Two-Dimensional Oxidation of Si Substrate Surface;Plasma Chemistry and Plasma Processing;2018-02-22
4. Uniform Surface Oxidation of an Si Substrate by a Planar Modulated Inductively Coupled Thermal Plasma with Molecular Gas Feed;Plasma Chemistry and Plasma Processing;2017-03-04
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