Impact of the Use of Xe on Electrical Properties in Magnetron-Sputtering Deposited Amorphous InGaZnO Thin-Film Transistors
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference20 articles.
1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
2. High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering
3. Application of DC Magnetron Sputtering to Deposition of InGaZnO Films for Thin Film Transistor Devices
4. Present status of amorphous In–Ga–Zn–O thin-film transistors
5. Ion energy, ion flux, and ion mass effects on low‐temperature silicon epitaxy using low‐energy ion bombardment process
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Kr-Plasma Sputtering for Pt Gate Electrode Deposition on MFSFET with 5 nm-Thick Ferroelectric Nondoped HfO<sub>2</sub> Gate Insulator for Analog Memory Application;IEICE Transactions on Electronics;2023-10-01
2. Effect of Kr/O2-Plasma Reactive Sputtering on Ferroelectric Nondoped HfO₂ Formation for MFSFET With Pt Gate Electrode;IEEE Transactions on Electron Devices;2021-05
3. Improvement in the Negative Bias Illumination Stress Stability for Silicon-Ion Implanted Amorphous InGaZnO Thin-Film Transistors;IEEE Electron Device Letters;2017-03
4. 3.2:Invited Paper: Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions;SID Symposium Digest of Technical Papers;2014-06
5. Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film transistors by rotation magnet sputtering incorporating a Xe recycle-and-supply system;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-03
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