Ultrahigh-performance (100)-oriented polycrystalline silicon thin-film transistors and their microscopic crystal structures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/10/i=5/a=056501/pdf
Reference27 articles.
1. Excimer laser crystallization techniques for polysilicon TFTs
2. Ultrahigh-Performance Polycrystalline Silicon Thin-Film Transistors on Excimer-Laser-Processed Pseudo-Single-Crystal Films
3. Location and Crystallographic Orientation Control of Si Grains through Combined Metal Induced Lateral Crystalization and µ-Czochralski Process
4. Integrated high performance (100) and (110) oriented single-grain Si TFTs without seed substrate
5. High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization
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