Conduction Mechanism and Reliability Characteristics of a Metal–Insulator–Metal Capacitor with Single ZrO2Layer-Reference-Cited by-同舟云学术

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Conduction Mechanism and Reliability Characteristics of a Metal–Insulator–Metal Capacitor with Single ZrO2Layer

Published:2011-04-01 Issue:4S Volume:50 Page:04DD02
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kwon Hyuk-Min,Han In-Shik,Park Sang-Uk,Bok Jung-Deuk,Jung Yi-Jung,Shin Hong-Sik,Kang Chang-Yong,Lee Byoung-Hun,Jammy Raj,Lee Ga-Won,Lee Hi-Deok

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference19 articles.

1. Characterization and Modeling of Voltage and Temperature Dependence of Capacitance in Al2O3-Laminated Ta2O5Metal–Insulator–Metal Capacitor

2. High-Density RF MIM Capacitors Using High-k La[sub 2]O[sub 3] Dielectrics

3. Surface Control of Bottom Electrode in Ultra-Thin SiN Metal–Insulator–Metal Decoupling Capacitors for High Speed Processors

4. Characterization of Metal Insulator Metal Electrical Properties of Electron Cyclotron Resonance Plasma Deposited Ta2O5

5. Bulk and Interface effects on voltage linearity of ZrO2–SiO2 multilayered metal-insulator-metal capacitors for analog mixed-signal applications

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The planar anodic Al ₂ O ₃ -ZrO ₂ nanocomposite capacitor dielectrics for advanced passive device integration;Science and Technology of Advanced Materials;2023-02-13

2. Conduction mechanisms and charge trapping control in SiO2 nanoparticle MIM capacitors;Electrochimica Acta;2020-06

3. Dielectric Enhancement of Atomic Layer-Deposited Al2O3/ZrO2/Al2O3 MIM Capacitors by Microwave Annealing;Nanoscale Research Letters;2019-02-11

4. MIM capacitors with various Al2O3thicknesses for GaAs RFIC application;Journal of Semiconductors;2015-05

5. Electrical conduction mechanism in bulk ceramic insulators at high voltages until dielectric breakdown;Journal of Applied Physics;2015-04-21

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