Conduction mechanisms and charge trapping control in SiO2 nanoparticle MIM capacitors
Author:
Funder
MINECO
European Space Agency
SENESCYT
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference32 articles.
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3. Surface control of bottom electrode in ultra-thin SiN metal–insulator–metal decoupling capacitors for high speed processors;Inoue;Jpn. J. Appl. Phys.,2007
4. Characterization of metal–insulator–metal electrical properties of electron cyclotron resonance plasma deposited Ta2O5;Ono;Jpn. J. Appl. Phys.,2006
5. Bulk and interface effects on voltage linearity of ZrO2-SiO2 multilayered metal-insulator-metal capacitors for analog mixed-signal applications;Park;Appl. Phys. Lett.,2009
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