Composition Dependence of Piezoelectric Properties of Pb(Zr,Ti)O3Films Prepared by Combinatorial Sputtering-Reference-Cited by-同舟云学术

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Composition Dependence of Piezoelectric Properties of Pb(Zr,Ti)O3Films Prepared by Combinatorial Sputtering

Published:2012-09-01 Issue:9S1 Volume:51 Page:09LA12
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Tomioka Kohei,Kurokawa Fumiya,Yokokawa Ryuji,Kotera Hidetoshi,Adachi Kazuhiko,Kanno Isaku

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference27 articles.

1. Thin Film Piezoelectrics for MEMS

2. Recent Progress in Materials Issues for Piezoelectric MEMS

3. Piezoelectric MEMS sensors: state-of-the-art and perspectives

4. PZT thin films for piezoelectric microactuator applications

5. Piezoelectric Properties of Polycrystalline Lead Titanate Zirconate Compositions

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients;Journal of Applied Physics;2021-08-21

2. Fundamentals of piezoelectric thin films for microelectromechanical systems;Nanostructures in Ferroelectric Films for Energy Applications;2019

3. Precise piezoelectric characterization of Pb(Hf,Ti)O3 thin films deposited by combinatorial sputtering;Thin Solid Films;2016-10

4. Fabrication of piezoelectric multilayer thin-film actuators;Microsystem Technologies;2016-02-09

5. Compositional dependence of Ba(Zr0.2Ti0.8)O3–(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering;Thin Solid Films;2015-08

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