Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients-Reference-Cited by-同舟云学术

Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients

Published:2021-08-21 Issue:7 Volume:130 Page:074101
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Jikyo Genki¹,Onishi Kouta¹,Nishikado Takumi¹,Kanno Isaku¹^ORCID,Kanda Kensuke²^ORCID

Affiliation:

1. Department of Mechanical Engineering, Kobe University, 1-1 Rokkodai-cho, Nada-ku, Kobe 657-8501, Japan

2. Department of Electronics and Computer Science, University of Hyogo, 2167 Shosha, Himeji 671-2280, Japan

Funder

Core Research for Evolutional Science and Technology

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0056802

Reference30 articles.

1. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

2. Piezoelectric MEMS sensors: state-of-the-art and perspectives

3. Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

4. Electromechanical coupling and output efficiency of piezoelectric bending actuators

5. Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

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