Improvement of a haptic feedback using Pb(Zr,Ti)O3 thin films on German silver foils
Author:
Funder
JST SPRING
JST-CREST
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s00542-023-05486-x.pdf
Reference36 articles.
1. Aalco Metals Limited (2020) Stainless Steel 1, 95-1, Datasheet Updated 13 March 2020. Aalco Metals Limited, Cham
2. Basdogan C, Giraud F, Levesque V, Choi S (2020) A review of surface haptics: enabling tactile effects on touch surface. IEEE Trans Hapt 14(8):1–1. https://doi.org/10.1109/toh.2020.2990712
3. Cardoletti J, Komissinskiy P, Bruder E, Morandi C, Alff L (2020) {001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition. J Appl Phys 128(10):104103. https://doi.org/10.1063/5.0019967
4. Chou TL, Yang SY, Chiang KN (2011) Overview and applicability of residual stress estimation of film–substrate structure. Thin Solid Films 519(22):7883–7894. https://doi.org/10.1016/j.tsf.2011.04.220
5. Duval FFC, Wilson SA, Ensell G, Evanno NMP, Cain MG, Whatmore RW (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sens Actuators, A 133(1):35–44. https://doi.org/10.1016/j.sna.2006.03.035
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