Ion beam etching process for high-density spintronic devices and its damage recovery by the oxygen showering post-treatment process
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/56/i=4S/a=04CE09/pdf
Reference30 articles.
1. Giant tunnelling magnetoresistance at room temperature with MgO (100) tunnel barriers
2. A perpendicular-anisotropy CoFeB–MgO magnetic tunnel junction
3. Giant room-temperature magnetoresistance in single-crystal Fe/MgO/Fe magnetic tunnel junctions
4. Giant tunnel magnetoresistance in magnetic tunnel junctions with a crystalline MgO(0 0 1) barrier
5. 230% room-temperature magnetoresistance in CoFeB∕MgO∕CoFeB magnetic tunnel junctions
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