Investigation of Trap Properties in High-k/Metal Gate p-Type Metal–Oxide–Semiconductor Field-Effect Transistors with SiGe Source/Drain Using Random Telegraph Noise Analysis
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/6/i=8/a=084201/pdf
Reference14 articles.
1. Advanced high-κ dielectric stacks with polySi and metal gates: Recent progress and current challenges
2. Origin of the Flatband-Voltage Roll-Off Phenomenon in Metal/High- $k$ Gate Stacks
3. Influences of surface reconstruction on the atomic-layer-deposited HfO2/Al2O3/n-InAs metal-oxide-semiconductor capacitors
4. Comparison of Low-Frequency Noise in Channel and Gate-Induced Drain Leakage Currents of High-$k$ nFETs
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Impact device processing and scaling on RTS;Random Telegraph Signals in Semiconductor Devices;2017
2. Trap properties of high-k/metal gate pMOSFETs with aluminum ion implantation by random telegraph noise and 1/fnoise measurements;Japanese Journal of Applied Physics;2014-01-01
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