Device Analysis of Pt/Ti Gate Si-Metal–Oxide–Semiconductor Field-Effect Transistor Hydrogen Gas Sensors: Unintentional Oxygen Invasion into Ti Layers
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference23 articles.
1. H2 selective gas sensor based on SnO2
2. Hydrogen Sensor Based on RF-Sputtered Thermoelectric SiGe Film
3. Air-Annealing Effects for Pt/Ti Gate Si-Metal–Oxide–Semiconductor Field-Effect Transistors Hydrogen Gas Sensor
4. A Pt–Ti–O gate Si-metal-insulator-semiconductor field-effect transistor hydrogen gas sensor
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1. Pt–Ti–O gate silicon–metal–insulator–semiconductor field-effect transistor hydrogen gas sensors in harsh environments;Japanese Journal of Applied Physics;2016-05-26
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