Characteristics of Vanadium Oxide Thin Films Prepared by Metal–Organic Decomposition for Bolometer Detectors
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference16 articles.
1. Receiving Properties of Thin-Film Slot Antenna Arrays for 28-THz-CO2 Laser Radiation
2. Properties of VO2 thin film prepared with precursor VO(acac)2
3. Fabrication of Dense Carbon Nanotube Films Using Microwave Plasma-Enhanced Chemical Vapor Deposition
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1. Investigation of Fabrication Conditions for VO2 Thin Films by MOD using Carbon Thermal Reduction;IEEJ Transactions on Fundamentals and Materials;2021-01-01
2. Evaluation of TiO2-dispersed VOx Thin Films Fabricated by MOD;IEEJ Transactions on Fundamentals and Materials;2019-12-01
3. Evaluation of characteristics in VO x microbolometer fabricated by MOD on Si 3 N 4 /SiO 2 membrane;Electronics and Communications in Japan;2019-01-04
4. Evaluation of Characteristics in VOx Microbolometer Fabricated by MOD on Si3N4/SiO2 Membrane;IEEJ Transactions on Fundamentals and Materials;2018-09-01
5. Sol-gel deposition and characterization of vanadium pentoxide thin films with high TCR;Sensors and Actuators A: Physical;2018-08
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