Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20030638?crawler=true&mimetype=application/pdf
Reference10 articles.
1. Development of miniature filters for wireless applications
2. Film Bulk Acoustic Resonator Fabrication for Radio Frequency Filter Applications
3. PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)
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1. A Feasibility Study of Fabrication of Piezoelectric Energy Harvesters on Commercially Available Aluminum Foil;Energies;2019-07-20
2. ZnO-based film bulk acoustic resonator devices on a specially designed Bragg reflector;Applied Physics A;2009-03-03
3. Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2009-01
4. A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications;Microwave and Optical Technology Letters;2008-02
5. Design and Fabrication of ZnO-Based FBAR Microwave Devices for Mobile WiMAX Applications;IEEE Microwave and Wireless Components Letters;2007-12
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