Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristics
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Published:2009-01
Issue:1
Volume:27
Page:67-72
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Mai Linh,Pham Van-Su,Yoon Giwan
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics