Author:
Rowe L.K.,Elsey M.,Tarr N.G.,Knights A.P.,Post E.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference7 articles.
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3. Wolf, S.: ‘Silicon processing for the VLSI era’, (Lattice Press, Sunset Beach, CA, USA 1990),2, p. 20–28, 32–35, 39–41
4. Heterogeneous process simulation tool integration
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