Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique-Reference-Cited by-同舟云学术

Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique

Published:2016-02-22 Issue: Volume:3 Page:
ISSN:2296-8016
Container-title:Frontiers in Materials
language:
Short-container-title:Front. Mater.

Author:

Debnath Kapil,Arimoto Hideo,Husain Muhammad K.,Prasmusinto Alyssa,Al-Attili Abdelrahman,Petra Rafidah,Chong Harold M. H.,Reed Graham T.,Saito Shinichi

Funder

Engineering and Physical Sciences Research Council

Seventh Framework Programme

University of Southampton

Hitachi

Publisher

Frontiers Media SA

Subject

Materials Science (miscellaneous)

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3. A broad-band waveguide grating coupler with a subwavelength grating mirror;Cheben;IEEE Photon. Technol. Lett.,2006

4. Nanoholes grating couplers for coupling between silicon-on-insulator waveguides and optical fibers;Chen;IEEE Photon. J.,2009

5. Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography;Dumon;IEEE Photon. Technol. Lett.,2004

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