Heterogeneous process simulation tool integration-Reference-Cited by-同舟云学术

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Heterogeneous process simulation tool integration

Published:1996 Issue:1 Volume:9 Page:35-48
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Sahul Z.H.,Wang K.C.,Ze-Kai Hsiau ,McKenna E.W.,Dutton R.W.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx3/66/10241/00484281.pdf?arnumber=484281

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. CMOS-compatible optical rib waveguides defined by local oxidation of silicon;Electronics Letters;2007

2. CHEOPS: A tool-integration platform for chemical process modelling and simulation;International Journal on Software Tools for Technology Transfer;2004-08

3. A TCAD system for VLSI implementation of the CVD process using VHDL;Integration;2004-02

4. Rigorous integration of semiconductor process and device simulators;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2003-09

5. A cellular automaton methodology for the simulation of integrated circuit fabrication processes;Future Generation Computer Systems;2002-04

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