Fabrication of size controllable SU‐8 nanochannels using nanoimprint lithography and low‐pressure thermal bonding methods-Reference-Cited by-同舟云学术

Fabrication of size controllable SU‐8 nanochannels using nanoimprint lithography and low‐pressure thermal bonding methods

Author:

Li Xiaojun¹,You Hui¹,Jiang Hai¹,Lin Ronghui¹,Kong Deyi¹,Jiang Rui¹,Zhu Likai¹,Gao Jun¹,Tang Min¹,Wang Xudi²,Fu Shaojun³

Affiliation:

1. Hefei Institute of Physical ScienceChinese Academy of SciencesHefei230031People's Republic of China

2. Hefei University of TechnologyHefei230009People's Republic of China

3. University of Science and Technology of ChinaHefei230000People's Republic of China

Funder

National Natural Science Foundation of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

Reference10 articles.

3. Shadow edge lithography for nanoscale patterning and manufacturing;Bai J.G.;Nano Technol.,2007

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