Fabrication of size controllable SU‐8 nanochannels using nanoimprint lithography and low‐pressure thermal bonding methods

Author:

Li Xiaojun1,You Hui1,Jiang Hai1,Lin Ronghui1,Kong Deyi1,Jiang Rui1,Zhu Likai1,Gao Jun1,Tang Min1,Wang Xudi2,Fu Shaojun3

Affiliation:

1. Hefei Institute of Physical ScienceChinese Academy of SciencesHefei230031People's Republic of China

2. Hefei University of TechnologyHefei230009People's Republic of China

3. University of Science and Technology of ChinaHefei230000People's Republic of China

Funder

National Natural Science Foundation of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

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